DSMC-Neutrals_Brochure
3D rarefied neutral gas solver using DSMC methodDSMC-Neutrals is a full 3D time dependent solver for the behavior of the rarefied neutral gas . It isa useful tool for the simulation of the behavior of the working gas in CVD and PVD reactors.DSMC-Neutrals has the following 2 modules ; (1) Neutral gas module and (2) Surface reaction
module.Major physics model included are the elastic and in-elastic collision for the inter-molecular collision process and the chemical reactions using TCE model. Sticking coefficient model is employed in the Surface reaction module. The solver is also highly parallelized using ‘mesh division method‘.
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