“常用公式”在线计算,“设计手册”在线查询
3D rarefied neutral gas solver using DSMC method
DSMC-Neutrals is a full 3D time dependent solver for the behavior of the rarefied neutral gas . It isa useful tool for the simulation of the behavior of the working gas in CVD and PVD reactors.DSMC-Neutrals has the following 2 modules ; (1) Neutral gas module and (2) Surface reaction
module.Major physics model included are the elastic and in-elastic collision for the inter-molecular collision process and the chemical reactions using TCE model. Sticking coefficient model is employed in the Surface reaction module. The solver is also highly parallelized using ‘mesh division method‘.
DSMC-Neutrals_Brochure.pdf (738.78 KB, 下载次数: 10)

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