“常用公式”在线计算,“设计手册”在线查询
Plasma and neutral gas solver using PIC particle method
'Particle-PLUS' is a kinetic process plasma/neutral solver which solves theBoltzmann Eq. using the particle method. Because of the particle method, the
solver is robust and easy to use. Precise atomic/molecular collision model and thewall-plasma interaction model that are essential in process plasma simulation are
also included. It is a useful tool for the simulation of the process plasma andneutral gas behaviors in the device development and experiments.Package
Particle-PLUS_Brochure.pdf (515.09 KB, 下载次数: 5)

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